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Title: The prediction of stiction failures in MEMS
Authors: van Spengen, Willem Merlijn ×
Puers, Robert
De Wolf, Ingrid #
Issue Date: 2003
Publisher: Institute of Electrical and Electronics Engineers
Series Title: IEEE transactions on device and materials reliability vol:3 issue:4 pages:167-172
ISSN: 1530-4388
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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