|ITEM METADATA RECORD
|Title: ||A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches|
|Authors: ||van Spengen, Merlijn ×|
De Wolf, Ingrid #
|Issue Date: ||2004 |
|Series Title: ||Journal of micromechanics and microengineering: structures, devices and systems vol:14 issue:4 pages:514-521|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||ESAT - MICAS, Microelectronics and Sensors|
× corresponding author|
# (joint) last author|
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