Title: A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches
Authors: van Spengen, Merlijn ×
Puers, Robert
Mertens, Robert
De Wolf, Ingrid #
Issue Date: 2004
Publisher: IOP
Series Title: Journal of micromechanics and microengineering: structures, devices and systems vol:14 issue:4 pages:514-521
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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