Title: Electrical characterization of ultra shallow dopant profiles
Authors: Clarysse, Trudo ×
Vandervorst, Wilfried
Collart, E. J. H
Murell, A. J #
Issue Date: 1999
Host Document: pages:76-88
Conference: Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes; Joint proceedings of the symposia on: location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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