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Title: On a more accurate assessment of scaled copper/low-k interconnects performance
Authors: Travaly, Youssef ×
Bamal, Mandeep
Carbonell, Laure
Tokei, Zsolt
Van Olmen, Jan
Iacopi, Francesca
Van Hove, Marleen
Stucchi, Michele
Maex, Karen #
Issue Date: Aug-2007
Publisher: Institute of Electrical and Electronics Engineers
Series Title: IEEE Transactions on Semiconductor Manufacturing vol:20 issue:3 pages:333-340
ISSN: 0894-6507
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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