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|ITEM METADATA RECORD
|Title: ||On a more accurate assessment of scaled copper/low-k interconnects performance|
|Authors: ||Travaly, Youssef ×|
Van Olmen, Jan
Van Hove, Marleen
Maex, Karen #
|Issue Date: ||Aug-2007 |
|Publisher: ||Institute of Electrical and Electronics Engineers|
|Series Title: ||IEEE Transactions on Semiconductor Manufacturing vol:20 issue:3 pages:333-340|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Electrical Engineering - miscellaneous|
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author|
# (joint) last author|
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