Title: Revealing the porous structure of low-k materials through solvent diffusion
Authors: Shamiryan, Denis
Baklanov, Mikhaïl
Maex, Karen
Issue Date: 2005
Publisher: Springer
Host Document: pages:305-314
Publication status: published
KU Leuven publication type: IHb
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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