|ITEM METADATA RECORD
|Title: ||Revealing the porous structure of low-k materials through solvent diffusion|
|Authors: ||Shamiryan, Denis|
|Issue Date: ||2005 |
|Host Document: ||pages:305-314|
|Publication status: ||published|
|KU Leuven publication type: ||IHb|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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