Title: X-ray photoelectron spectroscopy and time-of-flight secondary ion mass spectrometry study of the role of Ti and TiN caps on the cobalt/SiO2 interface
Authors: Conard, Thierry ×
Kondoh, Eiichi
De Witte, Hilde
Maex, Karen
Vandervorst, Wilfried #
Issue Date: 1999
Series Title: Journal of Vacuum Science & Technology A, Vacuum, Surfaces and Films vol:17 issue:4 pages:1244-1249
ISSN: 0734-2101
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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