Title: Impact of reactor- and transistor-type on electron shading
Authors: Creusen, Martin ×
Ackaert, J
De Backer, E
Groeseneken, Guido #
Issue Date: 1999
Host Document: pages:8-11
Conference: Proceedings 1999 International Symposium on Plasma Process-Induced Damage (P2ID); May 9-11, 1999; Monterey, CA, USA. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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