Title: Impact of plasma density and pattern aspect ratio on plasma damage in deep submicron CMOS technologies
Authors: Creusen, Martin ×
Van den bosch, G
van der Groen, Sonja
Groeseneken, Guido
Ackaert, J
De Backer, E #
Issue Date: 1999
Host Document: pages:164-167
Conference: ESSDERC'99 - Proceedings of the 29th European Solid-State Device Research Conference; 13-15 September 1999; Leuven, Belgium. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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