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Title: Minimization of specific contact resistance in multiple gate NFETs by selective epitaxial growth of Si in the HDD regions
Authors: Dixit, Abhisek ×
Kottantharayil, Anil
Rooyackers, Rita
Leys, Frederik
Kaiser, Monja
Collaert, Nadine
De Meyer, Christina
Jurczak, Malgorzata
Biesemans, Serge #
Issue Date: Apr-2006
Series Title: Solid-State Electronics vol:50 issue:4 pages:587-593
ISSN: 0038-1101
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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