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Title: Characterization of atomic layer deposited nanoscale structure on dense dielectric substrates by X-ray reflectivity
Authors: Travaly, Youssef ×
Schuhmacher, J
Martin Hoyas, Ana
Abell, T
Sutcliffe, Vic
Jonas, M
Van Hove, Marleen
Maex, Karen #
Issue Date: 2005
Series Title: Microelectronic Engineering vol:82 issue:03/04/07 pages:639-644
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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