|ITEM METADATA RECORD
|Title: ||The limitations of SIMS in nanoscale technologies: quantitative near-surface and interfacial analysis of complex systems|
|Authors: ||Vandervorst, Wilfried ×|
Brijs, Bert #
|Issue Date: ||2005 |
|Conference: ||Abstracts Book 15th International Conference on Secondary Ion Mass Spectrometry - SIMS XV location:Leuven Belgium date:12/09/05|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Electrical Engineering - miscellaneous|
× corresponding author|
# (joint) last author|
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