Title: The limitations of SIMS in nanoscale technologies: quantitative near-surface and interfacial analysis of complex systems
Authors: Vandervorst, Wilfried ×
Janssens, Tom
Geenen, Luc
Huyghebaert, Cedric
Conard, Thierry
Brijs, Bert #
Issue Date: 2005
Conference: Abstracts Book 15th International Conference on Secondary Ion Mass Spectrometry - SIMS XV location:Leuven Belgium date:12/09/05
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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