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Title: Dopant/carrier profiling for sub-45nm technologies
Authors: Vandervorst, Wilfried ×
Janssens, Tom
Eyben, Pierre
Duriau, Edouard #
Issue Date: 2005
Conference: 8th International Workshop on Fabrication, Characterization and Modeling of Ultra Shallow Junctions in Semiconductors location:Leuven Belgium date:05/06/05
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Electrical Engineering - miscellaneous
Faculty of Engineering Science - miscellaneous
× corresponding author
# (joint) last author

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