Title: Ge-migration in s-Si-SiGe structures during implantation and annealing
Authors: Vandervorst, Wilfried
Janssens, Tom
Geenen, Luc
Loo, Roger
Caymax, Matty
Delhougne, Romain
Pawlak, Bartek
Ravit, Claire
Issue Date: 2005
Conference: 8th International Workshop on the Fabrication, Characterization and Modeling of Ultra-Shallow Junctions in Semiconductors location:Leuven Belgium date:05/06/05
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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