|ITEM METADATA RECORD
|Title: ||Ge-migration in s-Si-SiGe structures during implantation and annealing|
|Authors: ||Vandervorst, Wilfried|
|Issue Date: ||2005 |
|Conference: ||8th International Workshop on the Fabrication, Characterization and Modeling of Ultra-Shallow Junctions in Semiconductors location:Leuven Belgium date:05/06/05|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Electrical Engineering - miscellaneous|
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