Title: Dopant/carrier profiling for sub-45 nm semiconductor technologies
Authors: Vandervorst, Wilfried # ×
Issue Date: 2005
Conference: Physical and Electrical Characterization of Materials and Devices for Silicon Nanoelectronics location:Leuven Belgium date:11/06/05
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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