Title: Reliability of RF-MEMS: stress relaxation in Al-alloy films
Authors: Modlinski, Robert ×
Chen, Q
Witvrouw, Ann
Ratchev, Petar
Puers, Robert
den Toonder, J.M.J
De Wolf, Ingrid #
Issue Date: 2003
Conference: 14th MicroMechanics Europe Workshop location:Delft, The Netherlands date:Nov 2-4 2003
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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