Title: Scanning spreading resistance microscopy: sub-nm resolution carrier profiling with high sensitivity in advanced devices
Authors: Vandervorst, Wilfried
Issue Date: 2005
Conference: Workshop on Scanning Probe Microscopy location:Leuven Belgium date:09/11/05
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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