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Title: Novel high growth rate processes for depositing poly-SiGe structural layers at CMOS compatible temperatures
Authors: Mehta, Anshu ×
Gromova, Maria
Rusu, C
Baert, Kris
Van Hoof, Chris
Witvrouw, Ann
Richard, Olivier #
Issue Date: Jan-2004
Publisher: IEEE
Host Document: Proceedings IEEE MEMS pages:721-724
Conference: 17th IEEE International Conference in Micro Electro Mechanical Systems - MEMS location:Maastricht, The Netherlands date:Jan 25-29 2004
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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