|ITEM METADATA RECORD
|Title: ||Basics, properties and limitations of SIMS in nanometer scale semiconductor technologies|
|Authors: ||Vandervorst, Wilfried|
|Issue Date: ||2005 |
|Conference: ||Forschungszentrum Rossendorf location:Leuven Belgium date:03/11/05|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Electrical Engineering - miscellaneous|
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