|ITEM METADATA RECORD
|Title: ||The electrical equivalent sidewall damage in patterned low-k dielectrics|
|Authors: ||Iacopi, Francesca ×|
Maex, Karen #
|Issue Date: ||Feb-2004 |
|Series Title: ||Electrochemical and Solid-State Letters vol:7 issue:4 pages:G79-G82|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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