Title: The electrical equivalent sidewall damage in patterned low-k dielectrics
Authors: Iacopi, Francesca ×
Stucchi, Michele
Richard, Olivier
Maex, Karen #
Issue Date: Feb-2004
Series Title: Electrochemical and Solid-State Letters vol:7 issue:4 pages:G79-G82
ISSN: 1099-0062
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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