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Title: Improvement of ohmic contacts on AlGaN/GaN HEMT’s by using in-situ Si3N4 passivation layer
Authors: Derluyn, Joff ×
Van Daele, Benny
Boeykens, Steven
Cheng, Kai
Ruythooren, Wouter
Leys, Maarten
Germain, Marianne
Van Tendeloo, Gustaaf
Borghs, Gustaaf #
Issue Date: Jun-2005
Host Document: pages:I01
Conference: 11th European Workshop on MOVPE location:Leuven Belgium date:05/06/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - ELECTA, Electrical Energy Computer Architectures
Electrical Engineering - miscellaneous
Physics and Astronomy - miscellaneous
× corresponding author
# (joint) last author

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