Title: Reliability studies of MOCVD TiSin and EnCoRe Ta(N)/Ta
Authors: Tokei, Zsolt ×
Kelleher, Deirdre Maria
Mebarki, Bencherki
Mandrekar, T
Guggilla, S
Maex, Karen #
Issue Date: 2003
Series Title: Microelectronic Engineering vol:70 issue:02/04/07 pages:358-362
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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