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Title: Silicides for sub-40nm gate length CMOS
Authors: Kittl, Jorge
Lauwers, Anne
Chamirian, Oxana
Van Dal, Mark
Akheyar, Amal
de Potter de ten Broeck, Muriel
Lindsay, Richard
Maex, Karen #
Issue Date: 2003
Publisher: AVS
Host Document: pages:140-143
Conference: Proceedings of the AVS 4th International Conference on Microelectronics and Interfaces - ICMI location:Leuven Belgium date:03/03/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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