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|ITEM METADATA RECORD
|Title: ||Silicides for sub-40nm gate length CMOS|
|Authors: ||Kittl, Jorge|
Van Dal, Mark
de Potter de ten Broeck, Muriel
Maex, Karen #
|Issue Date: ||2003 |
|Host Document: ||pages:140-143|
|Conference: ||Proceedings of the AVS 4th International Conference on Microelectronics and Interfaces - ICMI location:Leuven Belgium date:03/03/03|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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