|ITEM METADATA RECORD
|Title: ||Transient sputter yields of silicon with and without oxygen flooding|
|Authors: ||Deleu, Jeroen|
|Issue Date: ||1998 |
|Conference: ||11th Annual SIMS Workshop; 10-13 May 1998; Austin, TX, USA.|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Electrical Engineering - miscellaneous|
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