Title: Transient sputter yields of silicon with and without oxygen flooding
Authors: Deleu, Jeroen
Brijs, Bert
Vandervorst, Wilfried
Issue Date: 1998
Conference: 11th Annual SIMS Workshop; 10-13 May 1998; Austin, TX, USA.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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