Title: Effect of implantation oxide on the Ti- and Co-silicidation of narrow diffusion and poly-lines
Authors: Lauwers, A ×
Naem, Abdalla
de Potter de ten Broeck, Muriel
Maex, Karen #
Issue Date: 1998
Series Title: Thin Solid Films vol:320 pages:122-127
ISSN: 0040-6090
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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