Proceedings of the Advanced Metallization Conference 2002, Location: Leuven Belgium
Publication date:
2003-01-01
Pages:
759 -
765
Publisher:
MRS
Author:
Schuhmacher, Jörg
Beyer, Gerald ; Vos, Ingrid ; Sutcliffe, Victor ; Tokei, Zsolt ; Besling, W ; Maex, Karen