Title: Integration of ALD WCN into a dual damascene oxide module
Authors: Schuhmacher, Jörg ×
Beyer, Gerald
Vos, Ingrid
Sutcliffe, Victor
Tokei, Zsolt
Besling, W
Maex, Karen #
Issue Date: 2003
Publisher: MRS
Host Document: pages:759-765
Conference: Proceedings of the Advanced Metallization Conference 2002 location:Leuven Belgium date:01/10/02
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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