Title: Tof-SIMS depth profiling of Hf and Al composition variations in ultrathin mixed HfO2/Al2O3 oxides
Authors: Houssiau, L
Vitchev, R.G
Conard, Thierry
Vandervorst, Wilfried
Bender, Hugo
Issue Date: 2003
Conference: International Conference on Secondary Ion Mass Spectrometry - SIMS XIV date:14/09/03
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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