|ITEM METADATA RECORD
|Title: ||Tof-SIMS depth profiling of Hf and Al composition variations in ultrathin mixed HfO2/Al2O3 oxides|
|Authors: ||Houssiau, L|
|Issue Date: ||2003 |
|Conference: ||International Conference on Secondary Ion Mass Spectrometry - SIMS XIV date:14/09/03|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Electrical Engineering - miscellaneous|
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