|ITEM METADATA RECORD
|Title: ||Gas-phase surface proessing prior to 3.2nm gate oxidation|
|Authors: ||Ruzyllo, Jerzy|
Hyens, M. M
|Issue Date: ||1998 |
|Conference: ||4th International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '98); 21-23 Sept. 1998; Oostende, Belgium.|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Clinical Residents Medicine|
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