Electrical and physical characterization of MOSFETs with MBE grown La2HfO7 and HfO2 high-k dielectrics integrated in a conventional flow
Publication date:
2005-01-01
Author:
Conard, Thierry
Pantisano, Luigi ; Claes, Martine ; Demand, Marc ; Deweerd, Wim ; De Gendt, Stefan ; Houssa, Michel ; Lujan, Guilherme ; Ragnarsson, Lars-Ake ; Rohr, Erika ; Schram, Tom ; Hooker, Jacob ; Rittersma, Chris ; Fompeyrinne, J ; Loquet, JP