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Title: Electrical and physical characterization of MOSFETs with MBE grown La2HfO7 and HfO2 high-k dielectrics integrated in a conventional flow
Authors: Conard, Thierry
Pantisano, Luigi
Claes, Martine
Demand, Marc
Deweerd, Wim
De Gendt, Stefan
Houssa, Michel
Lujan, Guilherme
Ragnarsson, Lars-Ake
Rohr, Erika
Schram, Tom
Hooker, Jacob
Rittersma, Chris
Fompeyrinne, J
Loquet, J.P
Issue Date: 2005
Conference: Workshop "Nouveaux Oxides à Forte Permittivité dans l'Intégration des Semiconducteurs" location:Leuven Belgium date:30/01/05
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Molecular Design and Synthesis

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