Title: Physical characterization of mixed HfAlOx layers by complementary analysis techniques
Authors: Bender, Hugo
Conard, Thierry
Richard, Olivier
Brijs, Bert
Petry, Jasmine
Vandervorst, Wilfried
Defranoux, C
Boher, P
Rochat, N
Wyon, P
Mack, P
Wolstenholme, J
Vitchev, R
Houssiau, L
Pireaux, J.J
Bergmayer, A
Issue Date: 2003
Conference: European Materials Research Symposium I: Functional Metal Oxides - Semiconductor Structures location:Leuven Belgium date:10/06/03
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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