Title: Role of UV/chlorine exposure during dry surface conditioning before integrated epi deposition process
Authors: Ruzyllo, Jerzy
Röhr, Erika
Baeyens, Martien
Conard, Thierry
Mertens, Paul
Heyns, Marc
Issue Date: 1998
Conference: 4th International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '98); 21-23 Sept. 1998; Oostende, Belgium.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Clinical Residents Medicine

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