|ITEM METADATA RECORD
|Title: ||Electrical evaluation of the EPI/substrate interface quality after different in-situ and ex-situ low-temperature pre-epi cleaning methods|
|Authors: ||Caymax, Matty|
|Issue Date: ||1998 |
|Conference: ||4th International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '98); 21-23 Sept. 1998; Oostende, Belgium. location:Leuven Belgium|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Electrical Engineering - miscellaneous|
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