Title: Electrical evaluation of the EPI/substrate interface quality after different in-situ and ex-situ low-temperature pre-epi cleaning methods
Authors: Caymax, Matty
Decoutere, Stefaan
Röhr, Erika
Vandervorst, Wilfried
Heyns, Marc
Sprey, Hessel
Storm, Arjen
Maes, J
Issue Date: 1998
Conference: 4th International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '98); 21-23 Sept. 1998; Oostende, Belgium. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Electrical Engineering - miscellaneous

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