Title: Nitrogen profiling in high-k layers has much to gain from a combined TOFSIMS-Angle resolved XPS combined study
Authors: Conard, Thierry ×
Vandervorst, Wilfried
Brijs, Bert
Mack, P #
Issue Date: 2005
Conference: SIMS XV - 15th International Conference on Secondary Ion Mass Spectrometry location:Leuven Belgium date:12/09/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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