|ITEM METADATA RECORD
|Title: ||Nitrogen profiling in high-k layers has much to gain from a combined TOFSIMS-Angle resolved XPS combined study|
|Authors: ||Conard, Thierry ×|
Mack, P #
|Issue Date: ||2005 |
|Conference: ||SIMS XV - 15th International Conference on Secondary Ion Mass Spectrometry location:Leuven Belgium date:12/09/05|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
× corresponding author|
# (joint) last author|
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