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Title: Nitrogen analysis in high-k stack layers: a challenge
Authors: Conard, Thierry
Vandervorst, Wilfried
De Witte, H
Van Elshocht, Sven #
Issue Date: 2003
Publisher: AVS Science and Technology
Host Document: pages:91
Conference: International Conference on Secondary Ion Mass Spectrometry - SIMS XIV location:Leuven Belgium date:14/09/03
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Electrical Engineering - miscellaneous
# (joint) last author

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