Title: Depth profiling of ZrO2/SiO2/Si stacks-TOF-SIMS and computer simulation study
Authors: Ignatova, V.A ×
Conard, Thierry
Moeller, W
Vandervorst, Wilfried
Gijbels, R #
Issue Date: 2003
Publisher: AVS Science and Technology
Host Document: pages:94
Conference: International Conference on Secondary Ion Mass Spectrometry - SIMS XIV date:14/09/03
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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