Title: Near-surface B/As profiling with SIMS: (in)solvable problems?
Authors: Vandervorst, Wilfried ×
Geenen, Luc
Huyghebaert, Cedric
Fruehauf, Jens
Bergmaier, A
Dollinger, G
Vandenberg, J.A #
Issue Date: 2003
Publisher: AVS Science and Technology
Host Document: pages:233
Conference: International Conference on Secondary Ion Mass Spectrometry - SIMS XIV location:Leuven Belgium date:14/09/03
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Electrical Engineering - miscellaneous
Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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