Advanced cleaning and ultra-thin oxide technology
Publication date:
1998-01-01
Author:
Heyns, Marc
Cornelissen, Ingrid ; De Gendt, Stefan ; Degraeve, Robin ; Knotter, DM ; Mertens, Paul ; Mertens, S ; Meuris, Marc ; Nigam, Tanya ; Rotondaro, Antonio ; Schaekers, Marc ; Teerlinck, Ivo ; Vos, Rita ; Wolke, K