Title: Vapor phase decomposition - droplet collection. Can we improve the collection efficiency for copper contamination?
Authors: De Gendt, Stefan ×
Huber, A
Onsia, Bart
Arnauts, Sophia
Kenis, Karine
Knotter, D. M
Mertens, Paul
Heyns, Marc #
Issue Date: 1999
Host Document: pages:93-96
Conference: Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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