|ITEM METADATA RECORD
|Title: ||Evaluation of ozonated water spray for resist cleaning applications|
|Authors: ||De Gendt, Stefan|
Van Hoeymissen, Jan
Jassal, A. S
|Issue Date: ||1999 |
|Conference: ||196th Meeting of the Electrochemical Society:6th International Symposium on Cleaning Technology in Semiconductor Device Manufact location:Leuven Belgium|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Clinical Residents Medicine|
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