Title: Evaluation of ozonated water spray for resist cleaning applications
Authors: De Gendt, Stefan
Lux, Marcel
Claes, M
Van Hoeymissen, Jan
Jassal, A. S
Worth, W
Lagrange, Sébastien
Bergman, E
Mertens, Paul
Heyns, Marc
Issue Date: 1999
Conference: 196th Meeting of the Electrochemical Society:6th International Symposium on Cleaning Technology in Semiconductor Device Manufact location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Clinical Residents Medicine

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