Title: Uncooled IR bolometers using surface micromachined Poly SiGe
Authors: De Moor, Piet ×
Sedky, Sherif
Sabuncuoglu, Deniz
Van Hoof, Chris #
Issue Date: 1999
Host Document: pages:43-46
Conference: Proceedings 2nd International Conference on Integrated Micro/Nano Technology for Space Applications - MNT; April 1999; Pasadena, location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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