Title: Rare-earth metal scandate high-k layers: promises and problems
Authors: Zhao, Chao ×
Heeg, T
Wagner, M
Schubert, J
Witters, Thomas
Brijs, Bert
Bender, Hugo
Richard, Olivier
Afanas'ev, Valeri
Houssa, Michel
Caymax, Matty
De Gendt, Stefan #
Issue Date: 2005
Publisher: The Electrochemical Society
Host Document: ECS Transactions vol:1 issue:5
Conference: ECS Meetings edition:208th location:Los Angeles, CA date:16-21 October
Article number: Paper #424
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Semiconductor Physics Section
Molecular Design and Synthesis
× corresponding author
# (joint) last author

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