Title: Evaluation of Nb(Si)N as metal gate material
Authors: Van Hoornick, Nausikaa ×
De Witte, Hilde
Witters, Thomas
Zhao, Chao
Conard, Thierry
Huatori, H
Swerts, Johan
Schram, Tom
Maes, J
De Gendt, Stefan
Heyns, Marc #
Issue Date: 2005
Publisher: The Electrochemical Society
Host Document: ECS Transactions vol:1 issue:5
Conference: ECS Meetings edition:208th location:Los Angeles date:16-21 October
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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