Title: High-k gate stack engineering – towards meeting low standby power and high performance targets
Authors: De Gendt, Stefan
Brunco, David
Caymax, Matty
Conard, Thierry
Date, Lucien
Delabie, Annelies
Deweerd, Wim
Groeseneken, Guido
Houssa, Michel
Hyun, Sangjin
Kaushik, Vidya
Kubicek, Stefan
Maes, J
Pantisano, Luigi
Ragnarsson, Lars-Ake
Rohr, Erika
Schram, Tom
Shimamoto, Y
Sleeckx, Erik
Vandervorst, Wilfried
Van Elshocht, Sven
Yamada, Naoki
Witters, Thomas
Zhao, Chao
Zimmerman, Paul
Heyns, Marc #
Issue Date: 2005
Publisher: ECS
Host Document: pages:109-117
Conference: Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS: New Materials, Processes, and Equipment location:Leuven Belgium date:15/05/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Electrical Engineering - miscellaneous
Molecular Design and Synthesis
# (joint) last author

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