Title: Capablities of TOF-SIMS to study the influence of different oxidation conditions on metal contamination redistribution
Authors: De Witte, Hilde ×
De Gendt, Stefan
Douglas, M
Conard, Thierry
Kenis, Karine
Mertens, Paul
Vandervorst, Wilfried
Gijbels, Renaat #
Issue Date: 1999
Host Document: pages:147-159
Conference: Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes; Joint proceedings of the symposia on:
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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