Title: Threshold voltage control in polysilicon or fully-silicided-Hf-based gate dielectric pMOSFETs using controlled lateral oxidation
Authors: Kaushik, Vidya ×
Rohr, Erika
Hyun, Sangjin
De Gendt, Stefan
Van Elshocht, Sven
Delabie, Annelies
Everaert, Jean-Luc
Veloso, Anabela
Brus, Stephan
Ragnarsson, Lars-Ake
Richard, Olivier
Caymax, Matty
Heyns, Marc #
Issue Date: 2005
Host Document: ECS Transactions vol:1 issue:5 pages:159
Conference: ECS Meeting edition:208th location:Los Angeles, Ca date:16-21 October
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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