Title: Accurate determination of Si sputter yield in the transient region
Authors: Deleu, Jeroen
Brijs, Bert
Vandervorst, Wilfried
Issue Date: 1999
Conference: SIMS XII; 5-10 September 1999; Brussel, Belgium.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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