|ITEM METADATA RECORD
|Title: ||Qualitative determination of the altered layer as a function of ion fluence: buildup, thickness and composition|
|Authors: ||Deleu, Jeroen|
|Issue Date: ||1999 |
|Conference: ||SIMS XII; 5-10 September 1999; Brussel, Belgium.|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Electrical Engineering - miscellaneous|
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