Title: Characterization of the B and As pile-up at the Si-SiO2 interface
Authors: Fruehauf, Jens ×
Lindsay, Richard
Vandervorst, Wilfried
Maex, Karen
Bergmaier, A
Dollinger, G
Koch, F #
Issue Date: 2003
Conference: Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic. location:Santa Cruz, CA, USA date:27/04/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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