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Title: A comparison of spike, flash, SPER and laser annealing for 45nm CMOS
Authors: Lindsay, Richard ×
Pawlak, Bartek
Kittl, Jorge
Henson, Kirklen
Torregiani, Cristina
Giangrandi, Simone
Surdeanu, Radu
Vandervorst, Wilfried
Mayur, A
Ross, J
McCoy, S
Gelpey, J
Elliott, K
Pagès, Xavier
Satta, Alessandra
Lauwers, Anne
Stolk, P
Maex, Karen #
Issue Date: 2003
Publisher: MRS
Host Document: pages:261-266
Conference: CMOS Front-End Materials and Process Technology location:Leuven Belgium date:21/04/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Physics and Astronomy - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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