Title: The influence of Ti capping layers on CoSi2 formation
Authors: Detavernier, C
Donaton, R
Maex, Karen
Van Meirhaeghe, R
Cardon, F
Issue Date: 1999
Conference: European Workshop Materials for Advanced Metallization; March 8-10, 1999; Oostende, Belgium.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.