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Title: Evidence on the mechanism of boron deactivation in Ge-preamorphized ultrashallow junctions
Authors: Pawlak, Bartek ×
Surdeanu, Radu
Colombeau, B
Smith, A.J
Cowern, N.E.B
Lindsay, Richard
Vandervorst, Wilfried
Brijs, Bert
Richard, Olivier
Cristiano, F #
Issue Date: 2004
Series Title: Applied Physics Letters vol:84 issue:12 pages:2055-2057
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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